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  Ion Beam Laboratory   Ion Beam
Laboratory

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Ion Beam Laboratory
 
Facility Overview
Dedicated to research, education and public service using ion accelerators.

Education | Public Service

Materials Analysis and High Energy Ion Implant
4 Megavolt Dynamitron

Dynamitron Accelerator open Dynamitron Control Console Ultra High Vacuum Chamber
Large Area Implant Holder High Resolution RBS spectrometer


Medium energy implantation
400 Kilovolt Varian (Extrion) 400-10A Implanter
Extrion Large Area Implant Holder Implant holder is discolored by ion implantation Extrion Implanter Console



Thin-film evaporation

Lasers
I-V and C-V instrumentation
Low temperature cryostat
Furnaces
SEM

Optical microscopy
Alpha-Step profiler